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Stealth-laser Wafer Dicing Equipment
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HGL Series
Summary
Relying on its own rich experience in the development of automation equipment, as well as the painstaking R&D of laser processing technology and the mastery of the characteristics of semiconductor materials, CHN.GIE takes the lead in researching and manufacturing HGL series advanced semiconductor wafer laser stealth dicing equipment in China, which breaks the international monopoly. After the evaluation by the national authority, it is determined that its "comprehensive performance has reached the international advanced level, and some of which are in the leading position in the world".
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Single-focus Stealth Dicing Equipment
Double-focus Stealth Dicing Equipment
Multifocal stealth dicing equipment
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PRODUCTS
Single-focus wafer laser stealth dicing equipment
Wafer Size
4in~8in
Wafer thicknes
3μm~1000μm
Number of focuses
1
HGL1341
Large-size single focus wafer laser stealth dicing equipment
Wafer Size
4in~12in
Wafer thicknes
3μm~1000μm
Number of focuses
1
HGL1351
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Material
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Application
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Single-focus Stealth Dicing Equipment
Multifocal stealth dicing equipment
Wafer Size 
4in~8in
Wafer thicknes
3μm~1000μm
Number of focuses
1.2.3.4
HGL3341
Multifocal large-size single focus wafer laser stealth dicing equipment

Wafer Size
4in~12in
Wafer thicknes
3μm~1000μm
Number of focuses
1.2.3.4
HGL3351
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Material 
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Application
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Multifocal Stealth Dicing Equipment
Universal double-focus large size wafer laser stealth dicing equipment
Wafer Size
4in~12in
Wafer thicknes
3μm~1000μm
Number of focuses
HGL2351
2
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Material
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Application
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Double-focus Stealth Dicing Equipment
PRODUCTS ADVANTAGES
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Laser Control Core
Mastering a variety of semiconductor and ceramic materials laser stealth dicing spectrum and optimal laser output and control technology and other core technologies
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High focusing accuracy
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Efficient Optical Path Control
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Optical path is stable and reliable
Meet the demands of high speed dicing
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Multifocal Dicing
The depth of laser focus can be controlled freely
The length of focus point can be controlled freely
The horizontal interval between two focuses can be controlled freely
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Real Time Monitoring
Panoramic vision real time monitoring
Real time monitoring with low power vision
Real time monitoring of medium power vision
Real time monitoring of high power vision
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05
Intelligent correction, ensure the highest dicing path accuracy
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06
Gantry Air Flotation Control
see details of various products
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High precision large span
gantry air floating mechanism
Maximum span
500mm
Maximum acceleration
3g
More Advantageous Technologies
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