Maximum acceleration 1.5G
The air flotation precision driving platform can ensure accurate movement and machining with a maximum acceleration of 1.5G within the span of 500mm, ensuring high machining precision and high efficiency production at the same time.
X-Y-Z three-axis precision motion control-(1 μ m)
The laser focus can be precisely controlled to 1 μ m in the three-axis direction of the X-Y-Z, ensuring that the cutting focus is always closely tracked, ensuring the horizontal cutting accuracy of the cut wafer and the laser modification depth in the longitudinal direction. So that each cut can achieve the best results.
X-Y-Z three-axis real-time trajectory correction-(1 μ m)
It is the first to create a real-time monitoring system, which can obtain the best cutting direction, route and the height of the whole route in real time before cutting each route, update the rapid response in real time, and adjust the best cutting direction, path and depth. The effect of [perfect segmentation] is really realized.
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